Auger electron spectroscopy

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An analytical instrument that measures the energies of secondary electrons (Auger electrons) ejected from a sample when it is subjected to an electron beam. Auger electron originate in the top 2 - 10 monolayers of the surface. The energy of the electron is characteristic of the parent atom and can thus be used to identify the composition of the atoms on the surface of the sample. Auger spectroscopy is a very sensitive surface analysis method.

Synonyms and Related Terms

AES; SAM; scanning auger microscopy; Auger-Spektroskopie (Deut.); spectrométrie d'électrons Auger (Fr.);